Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735401 | In-situ optical chamber surface and process sensor | Upendra Ummethala, Steven E. Babayan, Lei Lian | 2023-08-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735401 | In-situ optical chamber surface and process sensor | Upendra Ummethala, Steven E. Babayan, Lei Lian | 2023-08-22 |