Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11719952 | Adjustable achromatic collimator assembly for endpoint detection systems | Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Lei Lian, Upendra Ummethala | 2023-08-08 |
| 11688616 | Integrated substrate measurement system to improve manufacturing process performance | Upendra Ummethala, Blake Erickson, Prashanth Kumar, Steven Trey Tindel, Zhaozhao Zhu | 2023-06-27 |
| 11668602 | Spatial optical emission spectroscopy for etch uniformity | Blake Erickson, Keith R. Berding, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more | 2023-06-06 |
| 11619594 | Multiple reflectometry for measuring etch parameters | Blake Erickson, Keith R. Berding, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more | 2023-04-04 |
| D977504 | Portion of a display panel with a graphical user interface | Upendra Ummethala, Blake Erickson, Prashanth Kumar, Steven Trey Tindel, Zhaozhao Zhu | 2023-02-07 |