Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830779 | In-situ etch material selectivity detection system | Keith R. Berding, Soumendra N. Barman, Zhaozhao Zhu | 2023-11-28 |
| 11736818 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2023-08-22 |
| 11688616 | Integrated substrate measurement system to improve manufacturing process performance | Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2023-06-27 |
| 11668602 | Spatial optical emission spectroscopy for etch uniformity | Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more | 2023-06-06 |
| 11619594 | Multiple reflectometry for measuring etch parameters | Keith R. Berding, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more | 2023-04-04 |
| D977504 | Portion of a display panel with a graphical user interface | Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu | 2023-02-07 |