| 11830779 |
In-situ etch material selectivity detection system |
Keith R. Berding, Soumendra N. Barman, Zhaozhao Zhu |
2023-11-28 |
| 11736818 |
Smart camera substrate |
Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more |
2023-08-22 |
| 11688616 |
Integrated substrate measurement system to improve manufacturing process performance |
Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2023-06-27 |
| 11668602 |
Spatial optical emission spectroscopy for etch uniformity |
Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more |
2023-06-06 |
| 11619594 |
Multiple reflectometry for measuring etch parameters |
Keith R. Berding, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more |
2023-04-04 |
| D977504 |
Portion of a display panel with a graphical user interface |
Upendra Ummethala, Prashanth Kumar, Michael Kutney, Steven Trey Tindel, Zhaozhao Zhu |
2023-02-07 |
