Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11781214 | Differential capacitive sensors for in-situ film thickness and dielectric constant measurement | Yaoling Pan, Leonard Tedeschi | 2023-10-10 |
| 11736818 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Blake Erickson, Devendra Channappa Holeyannavar +4 more | 2023-08-22 |
| 11708635 | Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner | — | 2023-07-25 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Yaoling Pan, Leonard Tedeschi, Jennifer Y. Sun, Philip Allan Kraus, Xiaopu Li +6 more | 2023-02-14 |
| 11551905 | Resonant process monitor | Yaoling Pan, Vijaykumar Krithivasan, Shimin Mao, Kelvin Chan, Michael D. Willwerth +5 more | 2023-01-10 |
| 11545346 | Capacitive sensing data integration for plasma chamber condition monitoring | Yaoling Pan, Michael D. Willwerth, Leonard Tedeschi, Kiyki-Shiy Shang, Mikhail Taraboukhine +2 more | 2023-01-03 |