Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551951 | Methods and systems for temperature control for a substrate | Paul Z. Wirth, Kiyki-Shiy Shang | 2023-01-10 |
| 11545346 | Capacitive sensing data integration for plasma chamber condition monitoring | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Kiyki-Shiy Shang +2 more | 2023-01-03 |