Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11781214 | Differential capacitive sensors for in-situ film thickness and dielectric constant measurement | Patrick Tae, Yaoling Pan | 2023-10-10 |
| 11735486 | Process monitor device having a plurality of sensors arranged in concentric circles | Kartik Ramaswamy | 2023-08-22 |
| 11709477 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Todd Egan, Prashant Aji +2 more | 2023-07-25 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Yaoling Pan, Patrick Tae, Jennifer Y. Sun, Philip Allan Kraus, Xiaopu Li +6 more | 2023-02-14 |
| 11551905 | Resonant process monitor | Yaoling Pan, Vijaykumar Krithivasan, Shimin Mao, Kelvin Chan, Michael D. Willwerth +5 more | 2023-01-10 |
| 11545346 | Capacitive sensing data integration for plasma chamber condition monitoring | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Kiyki-Shiy Shang, Mikhail Taraboukhine +2 more | 2023-01-03 |