Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11781214 | Differential capacitive sensors for in-situ film thickness and dielectric constant measurement | Patrick Tae, Leonard Tedeschi | 2023-10-10 |
| 11685649 | Capping plate for panel scale packaging of MEMS products | John H. Hong, Tallis Young Chang, Edward Chan, Bing Wen, Kenji Nomura | 2023-06-27 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Patrick Tae, Leonard Tedeschi, Jennifer Y. Sun, Philip Allan Kraus, Xiaopu Li +6 more | 2023-02-14 |
| 11551905 | Resonant process monitor | Vijaykumar Krithivasan, Shimin Mao, Kelvin Chan, Michael D. Willwerth, Anantha K. Subramani +5 more | 2023-01-10 |
| 11545346 | Capacitive sensing data integration for plasma chamber condition monitoring | Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Kiyki-Shiy Shang, Mikhail Taraboukhine +2 more | 2023-01-03 |