Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830779 | In-situ etch material selectivity detection system | Blake Erickson, Soumendra N. Barman, Zhaozhao Zhu | 2023-11-28 |
| 11736818 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2023-08-22 |
| 11668602 | Spatial optical emission spectroscopy for etch uniformity | Blake Erickson, Michael Kutney, Zhaozhao Zhu, Tsung Feng Wu, Michael D. Willwerth +1 more | 2023-06-06 |
| 11619594 | Multiple reflectometry for measuring etch parameters | Blake Erickson, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more | 2023-04-04 |