Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830779 | In-situ etch material selectivity detection system | Keith R. Berding, Blake Erickson, Zhaozhao Zhu | 2023-11-28 |
| 11619594 | Multiple reflectometry for measuring etch parameters | Blake Erickson, Keith R. Berding, Michael Kutney, Zhaozhao Zhu, Michelle SanPedro +1 more | 2023-04-04 |