Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830728 | Methods for seamless gap filling of dielectric material | Chengyu Liu, Ruitong Xiong, Bo Xie, Yijun Liu, Li-Qun Xia | 2023-11-28 |
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2023-11-07 |
| 11802349 | Method for depositing high quality PVD films | Zihao Yang, Mingwei Zhu, Nag B. Patibandla, Yong Cao, Shumao ZHANG +3 more | 2023-10-31 |
| 11784127 | Ruthenium liner and cap for back-end-of-line | Wenjing Xu, Feng Chen, Tae Hong Ha, Lu Chen, Zhiyuan Wu | 2023-10-10 |
| 11776805 | Selective oxidation and simplified pre-clean | Bencherki Mebarki, Joung Joo Lee, Yi Xu, Yu Lei, Kelvin Chan +2 more | 2023-10-03 |
| 11764157 | Ruthenium liner and cap for back-end-of-line applications | Wenjing Xu, Feng Chen, Tae Hong Ha, Lu Chen, Zhiyuan Wu | 2023-09-19 |
| 11587873 | Binary metal liner layers | Gang Shen, Feng Chen, Yizhak Sabba, Tae Hong Ha, Zhiyuan Wu +1 more | 2023-02-21 |
| 11562909 | Directional selective junction clean with field polymer protections | Yu Lei, Xuesong Lu, Tae Hong Ha, Andrew Nguyen, Tza-Jing Gung +4 more | 2023-01-24 |
| 11562925 | Method of depositing multilayer stack including copper over features of a device structure | Shirish A. PETHE, Fuhong Zhang, Joung Joo Lee, Rui Li, Xiangjin Xie | 2023-01-24 |