Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830728 | Methods for seamless gap filling of dielectric material | Chengyu Liu, Ruitong Xiong, Xianmin Tang, Yijun Liu, Li-Qun Xia | 2023-11-28 |
| 11621162 | Systems and methods for forming UV-cured low-κ dielectric films | Ruitong Xiong, Sure Ngo, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2023-04-04 |
| 11600486 | Systems and methods for depositing low-κdielectric films | Ruitong Xiong, Sure Ngo, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2023-03-07 |
| 11572622 | Systems and methods for cleaning low-k deposition chambers | Ruitong Xiong, Kang Sub Yim, Yijun Liu, Li-Qun Xia, Sure Ngo | 2023-02-07 |
| 11548402 | Host system with AC charging inlet and method for identifying an electrical device connected thereto | Douglas S. Cesiel, Jacob A. St George, Brandon R. Jones, Aniket Kothari, Patricia M. Laskowsky +5 more | 2023-01-10 |