Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621162 | Systems and methods for forming UV-cured low-κ dielectric films | Bo Xie, Ruitong Xiong, Sure Ngo, Yijun Liu, Li-Qun Xia | 2023-04-04 |
| 11600486 | Systems and methods for depositing low-κdielectric films | Bo Xie, Ruitong Xiong, Sure Ngo, Yijun Liu, Li-Qun Xia | 2023-03-07 |
| 11594409 | Systems and methods for depositing low-k dielectric films | Shaunak Mukherjee, Deenesh Padhi, Abhijit A. Kangude, Rahul Rajeev, Shubham Chowdhuri | 2023-02-28 |
| 11572622 | Systems and methods for cleaning low-k deposition chambers | Bo Xie, Ruitong Xiong, Yijun Liu, Li-Qun Xia, Sure Ngo | 2023-02-07 |