Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621162 | Systems and methods for forming UV-cured low-κ dielectric films | Bo Xie, Ruitong Xiong, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2023-04-04 |
| 11600486 | Systems and methods for depositing low-κdielectric films | Bo Xie, Ruitong Xiong, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2023-03-07 |
| 11572622 | Systems and methods for cleaning low-k deposition chambers | Bo Xie, Ruitong Xiong, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2023-02-07 |