Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11714430 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril +2 more | 2023-08-01 |
| 11694908 | Gasbox for semiconductor processing chamber | Rahul Rajeev, Yunzhe Yang, Kedar Joshi | 2023-07-04 |
| 11594409 | Systems and methods for depositing low-k dielectric films | Shaunak Mukherjee, Kang Sub Yim, Deenesh Padhi, Rahul Rajeev, Shubham Chowdhuri | 2023-02-28 |