Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784127 | Ruthenium liner and cap for back-end-of-line | Wenjing Xu, Feng Chen, Tae Hong Ha, Xianmin Tang, Zhiyuan Wu | 2023-10-10 |
| 11764157 | Ruthenium liner and cap for back-end-of-line applications | Wenjing Xu, Feng Chen, Tae Hong Ha, Xianmin Tang, Zhiyuan Wu | 2023-09-19 |
| 11566324 | Conditioning treatment for ALD productivity | Christina L. Engler | 2023-01-31 |