Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784127 | Ruthenium liner and cap for back-end-of-line | Wenjing Xu, Feng Chen, Tae Hong Ha, Xianmin Tang, Lu Chen | 2023-10-10 |
| 11764157 | Ruthenium liner and cap for back-end-of-line applications | Wenjing Xu, Feng Chen, Tae Hong Ha, Xianmin Tang, Lu Chen | 2023-09-19 |
| 11587873 | Binary metal liner layers | Gang Shen, Feng Chen, Yizhak Sabba, Tae Hong Ha, Xianmin Tang +1 more | 2023-02-21 |