Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830725 | Method of cleaning a structure and method of depositing a capping layer in a structure | Naomi Yoshida, He Ren, Hao Jiang, Chenfei Shen, Chi-Chou Lin +2 more | 2023-11-28 |
| 11749543 | Chamber matching and calibration | Yu Lei, Anup Phatak, Hyman Lam, Chong Jiang, Malcolm Delaney +1 more | 2023-09-05 |
| 11562909 | Directional selective junction clean with field polymer protections | Yu Lei, Tae Hong Ha, Xianmin Tang, Andrew Nguyen, Tza-Jing Gung +4 more | 2023-01-24 |