Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749543 | Chamber matching and calibration | Xuesong Lu, Yu Lei, Anup Phatak, Hyman Lam, Chong Jiang +1 more | 2023-09-05 |
| 11655540 | Methods and apparatus for adjusting wafer performance using multiple RF generators | Chong Jiang | 2023-05-23 |