Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Martin Lee Riker, Keith A. Miller, William Fruchterman +4 more | 2023-11-07 |
| D998575 | Collimator for use in a physical vapor deposition (PVD) chamber | Martin Lee Riker, Lanlan Zhong, Kishor Kalathiparambil | 2023-09-12 |
| D997111 | Collimator for use in a physical vapor deposition (PVD) chamber | Martin Lee Riker, Lanlan Zhong, Kishor Kalathiparambil | 2023-08-29 |
| 11562925 | Method of depositing multilayer stack including copper over features of a device structure | Shirish A. PETHE, Joung Joo Lee, Rui Li, Xiangjin Xie, Xianmin Tang | 2023-01-24 |