Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842890 | Methods and apparatus for physical vapor deposition (PVD) dielectric deposition | Jothilingam Ramalingam | 2023-12-12 |
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2023-11-07 |