Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664229 | Nitride capping of titanium material to improve barrier properties | Yiyang WAN | 2023-05-30 |
| 11658014 | Apparatuses and methods of protecting nickel and nickel containing components with thin films | Pingyan Lei, Dien-Yeh Wu, Xiao-Ming He, Jennifer Y. Sun, Lei Zhou +3 more | 2023-05-23 |
| 11598003 | Substrate processing chamber having heated showerhead assembly | Faruk Gungor, Dien-Yeh Wu, Joel M. Huston, Mei Chang, Xiaoxiong Yuan +4 more | 2023-03-07 |
| 11555244 | High temperature dual chamber showerhead | Pingyan Lei, Dien-Yeh Wu, Jallepally Ravi, Xiaoxiong Yuan, Manjunatha Koppa +1 more | 2023-01-17 |