Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11753715 | Apparatus and methods for controlling concentration of precursors to processing chamber | William J. Durand | 2023-09-12 |
| 11628456 | Apparatus for increasing flux from an ampoule | Xiaoxiong Yuan, Daping Yao, Mei Chang | 2023-04-18 |
| 11566327 | Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system | Ilker Durukan, Muhammad M. Rasheed, Tatsuya Sato | 2023-01-31 |