Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11767593 | High temperature vacuum seal | Muhannad Mustafa | 2023-09-26 |
| 11767590 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhannad Mustafa, Mario D. Sanchez, Anqing Cui | 2023-09-26 |
| 11732358 | High temperature chemical vapor deposition lid | Muhannad Mustafa, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang | 2023-08-22 |
| 11719255 | Pumping liner for improved flow uniformity | Muhannad Mustafa, Mario D. Sanchez | 2023-08-08 |
| 11598454 | Apparatus and methods to prevent particle entry into gas lines | Muhannad Mustafa | 2023-03-07 |
| 11566327 | Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system | Ilker Durukan, Kenric Choi, Tatsuya Sato | 2023-01-31 |
| 11562914 | Heater cover plate for uniformity improvement | Ilker Durukan | 2023-01-24 |