Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11767590 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez | 2023-09-26 |
| 11715667 | Thermal process chamber lid with backside pumping | Dien-Yeh Wu, Wei V. Tang, Yixiong Yang, Bo Wang | 2023-08-01 |