Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11767590 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhammad M. Rasheed, Mario D. Sanchez, Anqing Cui | 2023-09-26 |
| 11767593 | High temperature vacuum seal | Muhammad M. Rasheed | 2023-09-26 |
| 11732358 | High temperature chemical vapor deposition lid | Muhammad M. Rasheed, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang | 2023-08-22 |
| 11719255 | Pumping liner for improved flow uniformity | Muhammad M. Rasheed, Mario D. Sanchez | 2023-08-08 |
| 11708850 | Self-tightening fastening apparatus for vibrating work-parts | Nusrat Jahan Chhanda | 2023-07-25 |
| 11598454 | Apparatus and methods to prevent particle entry into gas lines | Muhammad M. Rasheed | 2023-03-07 |