Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854773 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Sheng Guo, Marek Radko, Xiaoxiong Yuan, See-Eng Phan +3 more | 2023-12-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854773 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Sheng Guo, Marek Radko, Xiaoxiong Yuan, See-Eng Phan +3 more | 2023-12-26 |