| 11817331 |
Substrate holder replacement with protective disk during pasting process |
Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH, Bhaskar PRASAD, Nitin Bharadwaj SATYAVOLU |
2023-11-14 |
| 11772137 |
Reactive cleaning of substrate support |
Xi Chen, Shreesha Yogish Rao, Sheng Guo, Chi Hong Ching, Cheng-Hsiung Tsai |
2023-10-03 |
| 11749542 |
Apparatus, system, and method for non-contact temperature monitoring of substrate supports |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA |
2023-09-05 |
| 11691343 |
Three-dimensional printing and three-dimensional printers |
Benyamin Buller, Zachary Ryan Murphree, Richard J. Romano, Alan Rick Lappen |
2023-07-04 |
| 11674227 |
Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU, Ganesh Subbuswamy, Devi Raghavee Veerappan |
2023-06-13 |
| 11646217 |
Transfer apparatus and substrate-supporting member |
Anubhav Srivastava, Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Lakshmikanth Krishnamurthy SHIRAHATTI |
2023-05-09 |
| 11610799 |
Electrostatic chuck having a heating and chucking capabilities |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU, Hari Prasath Rajendran +1 more |
2023-03-21 |
| 11600507 |
Pedestal assembly for a substrate processing chamber |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU |
2023-03-07 |
