Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610799 | Electrostatic chuck having a heating and chucking capabilities | Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU, Lakshmikanth Krishnamurthy SHIRAHATTI +1 more | 2023-03-21 |