| 11817331 |
Substrate holder replacement with protective disk during pasting process |
Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Bhaskar PRASAD, Nitin Bharadwaj SATYAVOLU |
2023-11-14 |
| 11749542 |
Apparatus, system, and method for non-contact temperature monitoring of substrate supports |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky |
2023-09-05 |
| 11674227 |
Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Ganesh Subbuswamy, Devi Raghavee Veerappan, Thomas Brezoczky |
2023-06-13 |
| 11646217 |
Transfer apparatus and substrate-supporting member |
Anubhav Srivastava, Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Lakshmikanth Krishnamurthy SHIRAHATTI |
2023-05-09 |
| 11610799 |
Electrostatic chuck having a heating and chucking capabilities |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Hari Prasath Rajendran, Lakshmikanth Krishnamurthy SHIRAHATTI +1 more |
2023-03-21 |
| 11600507 |
Pedestal assembly for a substrate processing chamber |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Thomas Brezoczky |
2023-03-07 |
