Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817331 | Substrate holder replacement with protective disk during pasting process | Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Bhaskar PRASAD | 2023-11-14 |
| 11674227 | Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure | Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Ganesh Subbuswamy, Devi Raghavee Veerappan, Thomas Brezoczky | 2023-06-13 |
| 11610799 | Electrostatic chuck having a heating and chucking capabilities | Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Hari Prasath Rajendran, Lakshmikanth Krishnamurthy SHIRAHATTI +1 more | 2023-03-21 |
| 11600507 | Pedestal assembly for a substrate processing chamber | Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Thomas Brezoczky | 2023-03-07 |