Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772137 | Reactive cleaning of substrate support | Xi Chen, Shreesha Yogish Rao, Sheng Guo, Thomas Brezoczky, Cheng-Hsiung Tsai | 2023-10-03 |
| 11621393 | Top buffer layer for magnetic tunnel junction application | Lin Xue, Chando Park, Jaesoo Ahn, Mahendra Pakala | 2023-04-04 |
| 11600476 | Deposition system with multi-cathode and method of manufacture thereof | Anantha K. Subramani, Deepak Jadhav, Ashish Goel, Hanbing Wu, Prashanth Kothnur | 2023-03-07 |
| 11552244 | Magnetic tunnel junction structures and methods of manufacture thereof | Lin Xue, Rongjun Wang, Mahendra Pakala | 2023-01-10 |