Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772137 | Reactive cleaning of substrate support | Xi Chen, Sheng Guo, Chi Hong Ching, Thomas Brezoczky, Cheng-Hsiung Tsai | 2023-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772137 | Reactive cleaning of substrate support | Xi Chen, Sheng Guo, Chi Hong Ching, Thomas Brezoczky, Cheng-Hsiung Tsai | 2023-10-03 |