Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815436 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Zhili Zuo, Song-Moon Suh | 2023-11-14 |
| 11735420 | Wafer treatment for achieving defect-free self-assembled monolayers | Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo, Liqi Wu +5 more | 2023-08-22 |