Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815436 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Chang Ke, Song-Moon Suh | 2023-11-14 |
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Zhili Zuo
Overall (2023): #181,779 of 537,848Top 35%
1
Patents 2023