Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854773 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Sheng Guo, Marek Radko, Steve Sansoni, Xiaoxiong Yuan +3 more | 2023-12-26 |
| 11815436 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Zhili Zuo, Chang Ke | 2023-11-14 |
| 11555250 | Organic contamination free surface machining | Yuanhong Guo, Sheng Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal +7 more | 2023-01-17 |