Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11732355 | Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber | Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Tobin Kaufman-Osborn +2 more | 2023-08-22 |
| 11634813 | Half-angle nozzle | — | 2023-04-25 |
| 11615944 | Remote plasma oxidation chamber | Christopher S. Olsen, Lara Hawrylchak, Agus Sofian Tjandra, Chaitanya A. PRASAD, Sairaju Tallavarjula | 2023-03-28 |