Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11732355 | Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber | Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Tobin Kaufman-Osborn +2 more | 2023-08-22 |