Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11650506 | Film structure for electric field guided photoresist patterning process | Huixiong Dai, Christopher S. Ngai, Srinivas D. Nemani, Ellie Yieh, Steven Hiloong WELCH | 2023-05-16 |
| 11609505 | Apparatus and methods for verification and re-use of process fluids | Gautam Pisharody, Lancelot HUANG, Alan Tso, Douglas A. Buchberger, Jr., Huixiong Dai +3 more | 2023-03-21 |