Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814747 | Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly | Joseph P. Margetis | 2023-11-14 |
| 11764058 | Three-color 3D DRAM stack and methods of making | Arvind Kumar, Mahendra Pakala, Ellie Yieh, Thomas Kirschenheiter, Anchuan Wang +1 more | 2023-09-19 |
| 11557474 | Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation | Joe Margetis, David Kohen | 2023-01-17 |