| 11798813 |
Selective removal of ruthenium-containing materials |
Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui |
2023-10-24 |
| 11769671 |
Systems and methods for selective metal compound removal |
Zhenjiang Cui |
2023-09-26 |
| 11764058 |
Three-color 3D DRAM stack and methods of making |
Arvind Kumar, Mahendra Pakala, Ellie Yieh, John Tolle, Thomas Kirschenheiter +1 more |
2023-09-19 |
| 11735467 |
Airgap formation processes |
Ashish Pal, Gaurav Thareja, Sankuei Lin, Ching-Mei Hsu, Nitin K. Ingle +1 more |
2023-08-22 |
| 11728177 |
Systems and methods for nitride-containing film removal |
Baiwei Wang, Oliver Jan, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui |
2023-08-15 |
| 11631589 |
Metal etch in high aspect-ratio features |
Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui |
2023-04-18 |
