Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798813 | Selective removal of ruthenium-containing materials | Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui, Anchuan Wang | 2023-10-24 |
| 11728177 | Systems and methods for nitride-containing film removal | Oliver Jan, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui, Anchuan Wang | 2023-08-15 |
| 11631589 | Metal etch in high aspect-ratio features | Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui, Anchuan Wang | 2023-04-18 |