Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798813 | Selective removal of ruthenium-containing materials | Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Anchuan Wang | 2023-10-24 |
| 11769671 | Systems and methods for selective metal compound removal | Anchuan Wang | 2023-09-26 |
| 11728177 | Systems and methods for nitride-containing film removal | Baiwei Wang, Oliver Jan, Rohan Puligoru Reddy, Xiaolin Chen, Anchuan Wang | 2023-08-15 |
| 11682560 | Systems and methods for hafnium-containing film removal | Hanshen Zhang, Daniella Holm | 2023-06-20 |
| 11631589 | Metal etch in high aspect-ratio features | Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Anchuan Wang | 2023-04-18 |