Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682560 | Systems and methods for hafnium-containing film removal | Zhenjiang Cui, Daniella Holm | 2023-06-20 |
| 11637002 | Methods and systems to enhance process uniformity | Saravjeet Singh, Alan Tso, Jingchun Zhang, Zihui Li, Dmitry Lubomirsky | 2023-04-25 |