Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815816 | Apparatus for post exposure bake of photoresist | Douglas A. Buchberger, Jr., Dmitry Lubomirsky, Srinivas D. Nemani | 2023-11-14 |
| 11798606 | Additive patterning of semiconductor film stacks | Srinivas D. Nemani, Ellie Yieh, Praburam Gopalraja, Steven Hiloong WELCH, Bhargav S. Citla | 2023-10-24 |