Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11721545 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Krishna Nittala, Pramit Manna +2 more | 2023-08-08 | $46,911,000 |
| 11699585 | Methods of forming hardmasks | Jui-Yuan Hsu, Pramit Manna, Karthik Janakiraman | 2023-07-11 | $39,838,000 |
| 11545376 | Plasma parameters and skew characterization by high speed imaging | Sidharth Bhatia, Edward P. Hammond, IV, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian | 2023-01-03 | $39,123,000 |