Issued Patents 2023
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837448 | High-temperature chamber and chamber component cleaning and maintenance method and apparatus | Shuran Sheng, Lin Zhang, Jiyong Huang, Jang Seok OH, Joseph C. Werner +4 more | 2023-12-05 |
| 11814928 | Isolation valves | Ashish Sharma | 2023-11-14 |
| 11798820 | Gas delivery systems and methods | Diwakar Kedlaya, Fang Ruan, Zubin Huang, Kaushik Alayavalli, Martin Jay Seamons +3 more | 2023-10-24 |
| 11784229 | Profile shaping for control gate recesses | Akhil Singhal, Allison Yau, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang +1 more | 2023-10-10 |
| 11757846 | Cognitive multi-encrypted mail platform | Madhusudhanan Krishnamoorthy | 2023-09-12 |
| 11742169 | Ultra-fast moving conductor with removable core pin | Andrew L. Gottschalk, Robert Michael Slepian, Andrew Deutsch | 2023-08-29 |
| 11721545 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Bhaskar Kumar, Krishna Nittala +2 more | 2023-08-08 |
| 11699577 | Treatment for high-temperature cleans | Sarah Michelle Bobek, Ruiyun Huang, Abdul Aziz Khaja, Amit Kumar BANSAL, Dong-Hyung LEE +6 more | 2023-07-11 |
| 11673298 | Casting method for encapsulating an electrical component | Louis G. Campbell | 2023-06-13 |
| 11670492 | Chamber configurations and processes for particle control | Fei Wu, Abdul Aziz Khaja, Sungwon Ha, Vinay Prabhakar | 2023-06-06 |
| 11646216 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Allison Yau, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang +1 more | 2023-05-09 |
| 11613812 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2023-03-28 |
| 11592812 | Sensor metrology data integration | Sidharth Bhatia, Garrett H. Sin, Heng-Cheng Pai, Pramod Nambiar, Irfan Jamil | 2023-02-28 |
| 11560623 | Methods of reducing chamber residues | Liangfa Hu, Prashant Kumar Kulshreshtha, Anjana M. Patel, Abdul Aziz Khaja, Viren Kalsekar +5 more | 2023-01-24 |
| 11545376 | Plasma parameters and skew characterization by high speed imaging | Sidharth Bhatia, Edward P. Hammond, IV, Bhaskar Kumar, Anup K. Singh, Vivek Shah | 2023-01-03 |