Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846011 | Lid stack for high frequency processing | Lin Zhang, Joseph C. Werner | 2023-12-19 |
| 11837448 | High-temperature chamber and chamber component cleaning and maintenance method and apparatus | Lin Zhang, Jiyong Huang, Jang Seok OH, Joseph C. Werner, Nitin Khurana +4 more | 2023-12-05 |
| 11768984 | Parameter sensing and computer modeling for gas delivery health monitoring | Ala Moradian, James L'HEUREUX, Rohit Mahakali, Karthik Ramanathan, Lin Zhang +4 more | 2023-09-26 |