Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11768984 | Parameter sensing and computer modeling for gas delivery health monitoring | Ala Moradian, Shuran Sheng, Rohit Mahakali, Karthik Ramanathan, Lin Zhang +4 more | 2023-09-26 |
| 11551917 | Reduction of Br2 and Cl2 in semiconductor processes | Joseph A. VAN GOMPEL | 2023-01-10 |