Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11768984 | Parameter sensing and computer modeling for gas delivery health monitoring | James L'HEUREUX, Shuran Sheng, Rohit Mahakali, Karthik Ramanathan, Lin Zhang +4 more | 2023-09-26 |
| 11752035 | Ultrasonic needles and transducer assemblies formed of non-metal materials or a combination of materials | Brian D. McCary, Toh Seng Goh, Matthew J. Fitzgerald | 2023-09-12 |
| 11733081 | Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system | Bindusagar Marath Sankarathodi, Zhiyuan Ye, Jyothi RAJEEVAN, Zuoming ZHU, Errol Antonio C. Sanchez +1 more | 2023-08-22 |