Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11733081 | Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system | Zhiyuan Ye, Jyothi RAJEEVAN, Ala Moradian, Zuoming ZHU, Errol Antonio C. Sanchez +1 more | 2023-08-22 |